Omega FMA 4000 manual

www .omega.com e-mail: info@omega.com U ser ’ s Guide FMA 4000 Digital Mass Flow Meters Shop online at[...]

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T ABLE OF CONTENTS 1. UNP ACKING THE FMA 4000 MASS FLOW METER ................................... 1.1 Inspect Package for External Damage................................................. 1.2 Unpack the Mass Flow Meter ............................................................... 1.3 Returning Merchandise for Repair ...............................[...]

7. CALIBRA TION PROCEDURES ................................................................. 7.1 Flow Calibration............................................................................... 7.2 Gas Calibration of FMA 4000 Mass Flow Meter ................................ 7.2.1 Connections and Initial Warm Up.......................................[...]

1 1. UNP ACKING THE FMA 4000 MASS FLOW METER 1.1 Inspect Package for External Damage Y our FMA 4000 Mass Flow Meter w as carefully packed in a sturdy cardboard car- ton, with anti-static cushioning materials to withstand shipping shock. Upon receipt, inspect the package f or possible e xter nal damage. In case of external damage to the package cont[...]

2 CAUTION: FMA 4000 TRANSDUCERS SHOULD NOT BE USED FOR MONITORING OXYGEN GAS UNLESS SPECIFICALL Y CLEANED AND PREP ARED FOR SUCH APPLICA TION. For more information, contact Omega 7 . Attitude limit of the Mass Flow Meter is ±15 F from calibration position (standard calibration is in horizontal position). This means that the gas flow path of the Fl[...]

3 2.2 Electrical Connections FMA 4000 is supplied with a 15 pin “D” connector . Pin diagram is presented in Figure b-1. 2.2.1 Power Supply Connections The power supply requirements f or FMA 4000 transducers are: 11 to 26 Vdc, (unipolar power supply) DC P ow er (+) --------------- pin 7 of the 15 pin “D” connector DC P ow er (-) ------------[...]

2.2.3 Communication Parameters and Connections The digital interf ace operates via RS485 (optional RS232) and provides access to applicable internal data including: flow , CPU temperature reading, auto zero , total- izer and alarm settings, gas table , conv ersion factors and engineering units selec- tion, dynamic response compensation and lineariz[...]

5 PIN FMA 4000 FUNCTION 1 Common, Signal Ground For Pin 2 (4-20 mA return). 2 0-5 Vdc or 4-20mA Flow Signal Output. 3 Relay No. 2 - Normally Open Contact. 4 Relay No. 2 - Common Contact. 5 Common, Power Supply (- DC power for 11 to 26 Vdc). 6 Relay No. 1 - Common Contact. 7 Plus Power Supply (+ DC power for 11 to 26 Vdc). 8 RS485 (-) (Optional RS23[...]

3. PRINCIPLE OF OPERA TION The stream of gas entering the Mass Flow transducer is split b y shunting a small por tion of the flow through a capillary stainless steel sensor tube. The remainder of the gas flows through the primar y flow conduit. The geometry of the primar y con- duit and the sensor tube are designed to ensure laminar flow in each br[...]

7 4. SPECIFICA TIONS FLOW MEDIUM: Please note that FMA 4000 Mass Flow Meters are designed to work only with clean gases. Never try to measure flow rates of liquids with any FMA 4000. CALIBRA TIONS: Per formed at standard conditions [14.7 psia (101.4 kPa) and 70 F F (21.1 F C)] unless otherwise requested or stated. ENVIRONMENT AL (PER IEC 664): Inst[...]

CAUTION: Omega makes no expressed or implied guarantees of corrosion resistance of mass flow meters as pertains to different flow media reacting with components of meters. It is the customers' sole responsibility to select the model suitable for a particular gas based on the fluid contacting (wetted) materials offered in the different models. [...]

9 5. OPERA TING INSTRUCTIONS 5.1 Preparation and W arm Up It is assumed that the Mass Flow Meter has been correctly installed and thor- oughly leak tested as described in section 2. Make sure the flo w source is OFF . When applying power to a flo w meter within the first two seconds, y ou will see on the LCD displa y: the product name, the software[...]

10 During initial powering of the FMA 4000 transducer , the flow output signal will be indicating a higher than usual output. This is an indication that the FMA 4000 transducer has not y et attained its minimum operating temperature . This condition will automatically cancel within a f ew minutes and the transducer should e ventu- ally indicate zer[...]

11 5.3 FMA 4000 Parameters Settings 5.3.1 Engineering Units Settings The FMA 4000 Mass Flow Meter is capab le of displaying flo w rate with 23 diff erent Engineering Units. Digital interface commands (see parag raph 8.3 ASCII Command Set “FMA 4000 SOFTW ARE INTERF ACE COMMANDS”) are pro vided to: - get currently activ e Engineer ing Units - set[...]

5.3.2 Gas T able Settings The FMA 4000 Mass Flow Meter is capab le of storing calibration data for up to 10 diff erent gases. Digital interface commands are provided to: - get currently active Gas T able number and Gas name - set desired Gas T able . 5.3.3 T otalizer Settings The total volume of the gas is calculated b y integrating the actual gas [...]

Mode Enable /Disable - Allows the user to Enable/Disab le Flow Alarm. Low Alarm - The value of the monitored Flo w in % F .S. below which is considered an alarm condition. Note: The value of the Lo w alarm must be less than the value of the High Alarm. High Alarm - The value of the monitored Flow in % F .S. abov e which is considered an alarm condi[...]

The current Flow Alarm settings and status are av ailable via digital interf ace (see paragr aph 8.3 ASCII Command Set “FMA 4000 SOFTW ARE INTERF ACE COM- MANDS”). 5.3.5 Relay Assignment Settings T wo sets of dr y contact rela y outputs are provided to actuate user supplied equip- ment. These are programmab le via digital interf ace such that t[...]

15 The av ailable K F actor settings are: • Disabled (K = 1). • Inter nal Index The index [0-35] from internal K f actor table (see APPENDIX II). • User Defined User defined con version f actor. 5.3.7 Zero Calibration The FMA 4000 includes an auto zero function that, when activ ated, automatical- ly adjusts the mass flow sensor to read z ero.[...]

16 Figure b-6: FMA 4000 Screen in the beginning of Auto Zero procedure. The A uto Zero procedure nor mally takes 1 - 2 min utes dur ing which time the DP Zero counts and the Sensor reading changes appro ximately ev er y 3 to 6 seconds. Figure b-7: FMA 4000 during the Auto Zero procedure. The nominal value f or a fully balanced sensor is 120 Counts.[...]

17 5.3.8 Self Diagnostic Alarm FMA 4000 series Mass Flow Meters are equipped with a self-diagnostic alarm which is av ailable via m ulticolor LED , digital interface and on screen indication (f or de vices with optional LCD). The f ollowing diagnostic e vents are supported: 5.4 Analog Output Signals configuration FMA 4000 series Mass Flow Meters ar[...]

18 Analog output signals of 0-5 Vdc and 4-20 mA are attained at the appropriate pins of the 15-pin “D” connector (see Figure b-1 ) on the side of the FMA 4000 transducer . Ta b l e V I Analog Output Jumper Configuration See APPENDIX IV f or actual jumpers lay out on the PCB. 6. MAINTENANCE 6.1 Introduction It is impor tant that the Mass Flow Me[...]

19 6.2 Flow Path Cleaning Bef ore attempting any disassembly of the unit f or cleaning, try inspecting the flow paths by looking into the inlet and outlet ends of the meter f or any debris that ma y be clogging the flow through the meter . Remov e debris as necessar y . If the flow path is clogged, proceed with steps below . Do not attempt to disas[...]

20 7. CALIBRA TION PROCEDURES 7.1 Flow Calibration Omega ® Engineerings' Flow Calibration Laboratory offers prof essional calibration suppor t f or Mass Flow Meters using precision calibrators under strictly controlled conditions. NIST traceable calibr ations are av ailable. Calibrations can also be per- f or med at customers' site using[...]

21 7.2 Gas Flow Calibration of FMA 4000 Mass Flow Meter FMA 4000 Mass Flow Meters ma y be field recalibrated/chec ked f or the same range the y were originally factory calibrated for . When linearity adjustment is needed or flow range changes are being made , proceed to step 7.2.3. Flow range changes ma y require a different Restrictor Flow Element[...]

22 Gas flow calibration par ameters are separately stored in the Gas Dependent por- tion of the EEPROM memory for each of 10 calibr ation tables. See APPENDIX I f or complete list of gas dependent variables . The FMA 4000 gas flow calibration in volv es building a tab le of the actual flow v al- ues (inde xes 114, 116, 118, 120, 122, 124, 126, 128,[...]

If a simple communication terminal is used for communication with the FMA 4000, then “MW” (Memory Write) command from the software interface commands set ma y be used to adjust sensor value in the linearization table (see section 8.3 f or complete software interf ace commands list). Memor y Read “MR” command can be used to read the current [...]

24 The FMA 4000 analog output calibration in volv es calculation and storing of the offset and span variab les in the EEPROM f or each av ailable output. The 0-5 Vdc output has only scale variab le and 20 mA output has offset and scale variables . The f ollowing is a list of the Gas independent variab les used for analog output computation: Index N[...]

25 Enter Backdoor mode by typing: !11,MW ,1000,1[CR] Unit will respond with: !11,BackDoorEnabled: Y Disable DAC update by typing: !11,WRITE,4,D[CR] Unit will respond with: !11,DisableUpdate: D 7.3.2 Gas flow 0-5 Vdc analog output calibration 1. Install jumpers J7A, J7B and J7C on the PC board for 0-5 Vdc output (see T able VI). 2. Connect a certifi[...]

26 Enable DAC update by typing: !11,WRITE,4,N[CR] Unit will respond with: !11,DisableUpdate: N Close BackDoor access by typing: !11,MW ,1000,0[CR] Unit will respond with: !11,BackDoorEnabled: N 8. RS485 / RS232 SOFTWARE INTERF ACE COMMANDS 8.1 General The standard FMA 4000 comes with an RS485 interf ace. For the optional RS232 interf ace, the star [...]

27 The global address can be used to change RS485 address for a particular device with unknown address: 1. Make sure only one device (which address must be changed) is connected to the RS485 network. 2. T ype the memory write command with global address: !00,MW ,7,XX[CR] where XX, the new hexadecimal address, can be [01 – FF]. After assigning the[...]

28 8.3 ASCII Commands Set OMEGA FMA 4000 SOFTWARE INTERF ACE COMMANDS COMMAND NAME DESCRIPTION No. COMMAND SYNT AX Command Argument 1 Argument 2 Argument 3 Argument 4 Response Flow Requests the current flow sensor reading in current EU 1 F <Value> (Actual flow in current engineering units) Diagnostic Enable / Disable LCD Diagnostic messages ([...]

29 COMMAND NAME DESCRIPTION No. COMMAND SYNT AX Command Argument 1 Argument 2 Argument 3 Argument 4 Response Auto Zero Starts /reads the status of the auto zero feature (Note: The Z,N command can be used only when absolutely no flow thru the meter and no e a rl ie r then 6 minutes after power up. It can take sev era l minutes to complete. Uni t w i[...]

30 COMMAND NAME DESCRIPTION No. COMMAND SYNT AX Command Argument 1 Argument 2 Argument 3 Argument 4 Response Relay Action Assigns action of the two SPDT relays. The coil is energized when the condition specified by an Argument 2 becomes true. Argument 2: N - no action, relay disabled* T - totalizer reading > limit H - high flow alarm L - low flo[...]

31 COMMAND NAME DESCRIPTION No. COMMAND SYNT AX Command Argument 1 Argument 2 Argument 3 Argument 4 Response K Factors Applies a gas correction factor to the currently selected primary gas calibration table. (NOTE: does not work with % F .S. engineering unit.) See list of the internal K-factors in the operating manual. 9 K D*(disable, sets K=1) KD [...]

32 COMMAND NAME DESCRIPTION No. COMMAND SYNT AX Command Argument 1 Argument 2 Argument 3 Argument 4 Response Units Set the units of measure for gas flow and totalizer reading. Note: The units of the totalizer output are not per unit time. 10 U % (% full scale)* U:% mL/sec U:mL/sec mL/min U:mL/min mL/hr U:mL/hr L/sec U:L/sec L/min U:L/min L/hr U:L/h[...]

33 UART Error Codes: 1 - Not Supported Command or Back Door is not enabled. 2 - Wrong # of Arguments. 3 - Address is Out of Range (MR or MW commands). 4 - Wrong # of the characters in the Argument. 5 - Attempt to Alter Write Protected Area in the EEPROM. 6 - Proper Command or Argument is not found. 7 - Wrong value of the Argument. 8 - Reser ved. 9 [...]

34 9. TROUBLESHOOTING 9.1 Common Conditions Y our FMA 4000 Digital Mass Flow Meter w as thoroughly checked at n umerous quality control points during and after manufacturing and assemb ly operations. It was calibrated according to y our desired flow and pressure conditions f or a given gas or a mixture of gases. It was carefully pac ked to pre vent[...]

9.2 T roubleshooting Guide 35 NO . INDICA TION LIKEL Y REASON SOLUTION 1 No zero reading after 15 min. warm up time and no flow condition. Embedded temperature has been changed. Perform Auto Zero Procedure (see section 5.3.6 “Zero Calibration”). 2 Status LED indicator and LCD Display remains blank when unit is powered up. No response when flow [...]

36 NO . INDICA TION LIKEL Y REASON SOLUTION 8 Gas flows through the FMA 4000, but LCD Display reading and the output voltage 0-5 Vdc signal do not respond to flow . The gas flow is too low for particular model of FMA 4000. Check maximum flow range on transducer’ s front panel and make required flow adjustment. FMA 4000 models: RFE is not connecte[...]

9.3 T echnical Assistance OMEGA 7 Engineering will provide technical assistance ov er the phone to quali- fied repair personnel. Please call our Flow Depar tment at 800-872-9436 Ext. 2298. Please have y our Serial Number and Model Number ready when you call. 37 Q O2 = Q a = Q r X K = 1000 X 0.9926 = 992.6 sccm where K = relative K f actor to refere[...]

38 INDEX NAME DA T A TYPE NOTES 0 BlankEEPROM char[10] Do not modify . T able Revision [PROTECTED] 1 SerialNumber char[20] Serial Number [PROTECTED] 2 ModelNumber char[20] Model Number [PROTECTED] 3 SoftwareVer char[10] Firmware Version [PROTECTED] 4 TimeSinceCalHr float Time since last calibration in hours. 5 Options1 uint Misc. Options* 6 BackLig[...]

39 INDEX NAME DA T A TYPE NOTES 35 Klag [5] float DRC Lag Constant [Do Not Alter] 36 Kgain[0] float Gain for DRC Lag Constant [Do Not Alter] 37 Kgain[1] float Gain for DRC Lag Constant [Do Not Alter] 38 Kgain[2] float Gain for DRC Lag Constant [Do Not Alter] 39 Kgain[3] float Gain for DRC Lag Constant [Do Not Alter] 40 Kgain[4] float Gain for DRC L[...]

40 INDEX NAME DA T A TYPE NOTES 100 GasIdentifer char[20] Name of Gas [If not calibrated = “Uncalibrated”] 101 FullScaleFlow float Full Scale Range in l/min 102 StdT emp float Standard T emperature 103 StdPressure float Standard Pressure 104 StdDensity float Gas Standard Density 105 CalibrationGas char[20] Name of Gas used for Calibration [If n[...]

41 INDEX ACTUAL GAS K Factor Relative to N 2 Cp [Cal/g] DENSITY [g/I] 0 Acetylene C2H2 0.5829 .4036 1.162 1 Air 1.000 0.24 1.293 2 Allene (Propadiene) C3H4 0.4346 0.352 1.787 3 Ammonia NH 3 .7310 .492 .760 4 Argon Ar 1.4573 .1244 1.782 5 Arsine AsH3 0.6735 0.1167 3.478 6 Boron T richloride BCl3 0.4089 0.1279 5.227 7 Boron T riflouride BF3 0.5082 0.[...]

42 APPENDIX III GAS F ACTOR T ABLE (“K F ACTORS”)  CAUTION : K-Factors at best are only an approximation. K factors should not be used in applications that require accuracy better than +/- 5 to 10%. ACTUAL GAS K F ACTOR Relative to N 2 Cp [Cal/g] Density [g/I] Acetylene C 2 H 2 .5829 .4036 1.162 Air 1.0000 .240 1.293 Allene (Propadiene) C 3 [...]

43 ACTUAL GAS K FACTOR Relative to N 2 Cp [Cal/g] Density [g/I] Deuterium D 2 1.00 1.722 1.799 Diborane B 2 H 6 .4357 .508 1.235 Dibromodifluoromethane CBr 2 F 2 .1947 .15 9.362 Dichlorodifluoromethane (Freon-12) CCl 2 F 2 .3538 .1432 5.395 Dichlofluoromethane (Freon-21) CHCl 2 F .4252 .140 4.592 Dichloromethylsilane (CH 3 ) 2 SiCl 2 .2522 .1882 5.[...]

44 ACTUAL GAS K FACTOR Relative to N 2 Cp [Cal/g] Density [g/I] Hydrogen Bromide HBr 1.000 .0861 3.610 Hydrogen Chloride HCl 1.000 .1912 1.627 Hydrogen Cyanide HCN .764 .3171 1.206 Hydrogen Fluoride HF .9998 .3479 .893 Hydrogen Iodide HI .9987 .0545 5.707 Hydrogen Selenide H 2 Se .7893 .1025 3.613 Hydrogen Sulfide H 2 S .80 .2397 1.520 Iodine Penta[...]

45 ACTUAL GAS K FACTOR Relative to N 2 Cp [Cal/g] Density [g/I] Phosphorous Oxychloride POCl 3 .36 .1324 6.843 Phosphorous Pentafluoride PH 5 .3021 .1610 5.620 Phosphorous T richloride PCl 3 .30 .1250 6.127 Propane C 3 H 8 .35 .399 1.967 Propylene C 3 H 6 .40 .366 1.877 Silane SiH 4 .5982 .3189 1.433 Silicon T etrachloride SiCl 4 .284 .1270 7.580 S[...]

46 APPENDIX IV COMPONENT DIAGRAM TOP COMPONENT SIDE Aug. 09, 2007[...]

47 BOTTOM COMPONENT SIDE Aug 09, 2007[...]

APPENDIX V DIMENSIONAL DRA WINGS FMA 4000 WITHOUT READOUT 48[...]

FMA 4000 WITH READOUT OPTION 49[...]

W ARRANTY / DISCLAIMER OMEGA ENGINEERING, INC. warrants this unit to be free of def ects in materials and workmanship for a period of 13 months from date of purchase. OMEGA’ s W arranty adds an additional one (1) month grace period to the nor mal one (1) year pr oduct warranty to cover handling and shipping time . This ensures that OMEGA’ s cus[...]

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