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Table of contents for the manual
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Page 1
FMA 3200/3200ST/ 3400/3400ST Series Thermal Mass Flo w Controllers[...]
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Page 2
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Page 3
M-4271/0707 , pg. 3 of 26 READ THIS MANUAL COMPLETELY BEFORE ATTEMPTING TO CONNECT OR OPERATE YOUR FLOW SENSO R. FAILURE TO DO SO MAY RESULT I N INJURY TO YOU OR DAMAGE TO THE FLO W CONTROLL ER. TABLE OF CONT ENTS A. I ntr o du ct io n ...................... ............... ............... ............... ............... ........... 4 1. U np a cki[...]
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Page 4
M-4271/0707 , pg. 4 of 26 A. Introduction 1. Un pa cking All units ar e suitably p a ck a g ed to prev ent damage d urin g s hipping. I f e xterna l da m ag e is no ted u pon rece ipt of the packag e, pl ease c ontact Omega Engineering immediatel y. Open the p a ck age from t he top, t aking care not to cut too d eeply into t h e package. Remo ve a[...]
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Page 5
M-4271/0707 , pg. 5 of 26 sensor d e si gn. T his proven d esign minimizes z e ro dr ift w h il e maintai n in g fast r espons e and li near o utputs with v irtu a ll y no mainte nanc e . The FMA 3 200/3400 Series u tilize s therma l flow sensing technology. A portio n o f the gas flowi n g t hrough the unit is redirect ed in t o a sm all sensor tu[...]
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Page 6
M-4271/0707 , pg. 6 of 26 un it ma y be da mage d or fa il pr ema t u rel y. Such dama ge w ill no t be repaired un der warranty. Un i ts sh ou ld be in st a lle d in a c lea n, d r y en vi ron me n t w it h a n a mb ie nt te mp er at ure t h at i s as st ab le as p os si ble. Av oi d ar e as wit h s tro ng mag ne ti c fi el ds , st ro ng air f lo [...]
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Page 7
M-4271/0707 , pg. 7 of 26 2. Mounting the Fl ow Controller. The F MA 320 0/34 00 Series control lers hav e no p articul ar ori entati on o r in stal latio n re quire ments s o may be moun ted in any c onve nien t posi tion. It i s re commen ded tha t un its be fixed to a su itable subs trate usin g the two 4-40 mounting holes provided. Mountin g Vi[...]
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Page 8
M-4271/0707 , pg. 8 of 26 4. El e ct ri cal C on ne ction s Cauti o n: I ncorr e ct wir ing may caus e seve re dam a g e to t he unit . Applying an AC vo ltage (11 5VAC or 23 0VAC) directly to the un it will cau se dama ge. Re ad the follow ing instru cti ons care fu lly before m akin g any connections. a) Overview The FMA 3200/34 0 0 Series provid[...]
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Page 9
M-4271/0707 , pg. 9 of 26 b) Conne c ting The 6 P i n Mini D in Conne ctor Using a s u itabl e mating co nnector the pins of t he i n tegrat e d connect or sho u ld b e wir ed as foll ows: Connecti ng To The Inte grate d 6 Pi n Connecto r Pin 2 should be connect ed to the Positive of th e power sourc e . Pin 6 should be connected to the Negative (G[...]
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Page 10
M-4271/07 07, pg. 10 o f 26 c) Connecting The 6 Pin M ini Din Connector & FMA 3000C Cable Th e two m at in g co nne cto rs sho uld be p ush ed to get her and th e pi gta il leads wired as foll ows: Connecting To The Integrated 6 Pi n C onnector Using A FMA 3000C Ca b le The RED wire should be conn ected to th e Posi tive of the power s ource . [...]
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Page 11
M-4271/07 07, pg. 11 o f 26 d) Conne ctions F or The 9 P in D Sub C onnect o r Using a s u itabl e mating co nnector the pins of t he i n tegrat e d connect or sho u ld b e wir ed as foll ows: Connecti ng To The Inte grate d 9 Pi n Connecto r PIN 3 sh ould be connec te d to the Po sitive of the powe r sou rce. PIN 4 sh oul d be connec te d to the N[...]
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Page 12
M-4271/07 07, pg. 12 o f 26 e) Conne ctio ns For T he 15 D Sub Conne ctor Using a s u itabl e mating co nnector the pins of t he i n tegrat e d connect or sho u ld b e wir ed as foll ows: Connecti ng To The Integr ated 15 Pin Connec tor PIN 7 sh ould be connec te d to the Po sitive of the powe r sou rce. PIN 5 sh oul d be connec te d to the Ne gati[...]
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Page 13
M-4271/07 07, pg. 13 o f 26 f) Usin g a 0-5V DC I nput / Output Power A d a p ter Pa c ka g e . An optional 0-5VDC I nput / Output Power Ad a pter P a ck a ge is a v a il able for use with t he FM A 3 200/3 400 S e ri es. Thi s co nsists of a po wer so urc e (115VAC o r 2 30VAC), a connection hub a n d two c able assemblies wi th pig- tail (sold er[...]
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Page 14
M-4271/07 07, pg. 14 o f 26 C. Operation 1. Warm U p Before ap plying power to the un it che ck a ll t ubing a nd electric a l connections. On ce corr e ct inst a llat ion is verifi e d switch o n t he pow e r. T he unit sho uld then b e allowe d to warm up for 5 min utes be fore gas pr essur e is appli ed. 2. Ve ri fi c a t i on o f Ze r o Flow th[...]
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Page 15
M-4271/07 07, pg. 15 o f 26 Q 1 / Q 2 = K 1 / K 2 Q 1 is the flow rate of the new g as Q 2 is th e flow ra te of the orig ina l calibra tion gas K 1 is the K factor of th e new g a s K 2 is the K factor of t he original c alibra t ion gas Q 1 = (K 1 / K 2 ) Q 2 If K 2 is larger than K 1 t hen li ne ar r es ult s wi l l onl y b e a chi ev ed i f th [...]
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Page 16
M-4271/07 07, pg. 16 o f 26 If a ga s o the r tha n th e ca l ib ra t ion g a s is u se d the n the a dj us te d m axi mu m (full scal e ) f low f or t he unit sho uld be c a lcul ated using t he K F a ctor for that gas (s ee s e ctio n C3 abov e). A zero or negative set- po int voltage wil l cause t he solenoi d valve to c lose fully. Whilst cl os[...]
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Page 17
M-4271/07 07, pg. 17 o f 26 7. Zer o Adjustm ents The zero should be checked as d etailed in section C part 2 . If an adjustm ent is needed the Z e ro Pot entiomet er should be carefull y tur ned until the output (VDC) b e com es zero . Cauti o n: Do NOT ad just the Gain P otenti omete r when adjus ting th e zero or the unit w ill n eed to be re ca[...]
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Page 18
M-4271/07 07, pg. 18 o f 26 FMA 3400/3400ST Series Dip Switches Dip swit ch 4 is allo ca t ed to the pri m ary c a lib ration gas. Dip swit ch 5 is alloc a te d to the second c a libr ation gas (i f a p plic able). Dip switch 6 is a llo ca t ed to the t hird calibration g a s (i f app lica bl e). To select th e gas, the dip s witch should b e turn [...]
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Page 19
M-4271/07 07, pg. 19 o f 26 E. Specific ations Series FMA 3200 FMA 3400 FMA 3200ST FMA 3400ST Ac cur a cy (including linearity) ±1.5% of Full Scal e* ±1. 5% o f Full Sc ale* Second and third gases ±3. 0% F .S. * ±1.5 % o f Full Sc ale* ±1.5 % of Full Sc ale* Second and thi rd ga ses ±3.0 % F. S .* Repeatability ±0.25% Full Scale* Pressure Ra[...]
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Page 20
M-4271/07 07, pg. 20 o f 26 F. Dimensions ALL DIMEN SIONS IN INCHE S (MIL LIMETERS IN BRAC KETS) FMA 3200/3200ST Series - 1/4 ” Stainl ess Fittings Shown[...]
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Page 21
M-4271/07 07, pg. 21 o f 26 FMA 3400/3400ST Series - 1/4 ” Stainl ess Fittings Shown[...]
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Page 22
M-4271/07 07, pg. 22 o f 26 G. Gas K Facto rs Gas Chemical Symbo l K Fa ct or Ace tylene C 2 H 2 0.58 9 Air - 1.00 0 Argon Ar 1.438 Butane C 4 H 10 0.2 60 Ca rbon D io xide CO 2 0.73 9 Deu teriu m D 2 1.00 0 Ethyl ene C 2 H 4 0.59 8 Freon 11 CCL 3 F 0.3 30 Freon 12 CCL 2 F 2 0.3 54 Freon 13 CCLF 3 0.38 5 Freon 14 CF 4 0.42 0 Freon 22 CHCLF 2 0.46 0[...]
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Page 23
M-4271/07 07, pg. 23 o f 26 H. Troubleshooting Guide Symptom Poss ible Cau s e Method of Correction Clicking no ise from controlle r Unit i n error mode C heck there is suff icien t pres s ure and that th e f low path i s not restric ted or blocke d Unit wired incorrectly Check wiring is accordin g to Section B5 Loo se co nnectio n Check all c onne[...]
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Page 24
M-4271/07 07, pg. 24 o f 26 Symptom Poss ible Cau s e Method of Correction Insuf ficient or vary ing power Check the power supply ou tp ut a nd inc reas e i f necessary Insuf ficient pr essure En sur e the pres sure (an diffe r en tial pressu re) is high enou gh o op erat e the uni t. Varyin g pr essure Check the s tabi lity of the pressure regulat[...]
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Page 25
M-4271/07 07, pg. 25 o f 26 .[...]
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Page 26
M-4271/07 07, pg. 26 o f 26[...]