HELIX Compressor 9600 manuale d’uso

C HELIX TECHNOLO GY CORPORA TION - TI C RY OG EN ICS HELIX T ECHNOLOGY CO RPORATION http://www .helixtechnolo gy .com 9600 Compr essor Installation, Op eration, and Main ten anc e In stru ctio n s 8040540 Re v . 10 1 (12/2004)[...]

ELIX H ©2004 He lix T echno logy Cor poratio n Pri nted in USA The infor mation in thi s documen t is believed to be accura te and reliabl e. However, Helix Technology Corpora tio n, cannot accept a ny fin ancial or other respo nsibiliti es that may result from the use of this infor mation. No warranti es are granted or extended by this document .[...]

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9600 Com pres sor In stal lati on, Operat ion, a nd Ma intena nce P/N 804054 0 4 T a bl e of Co nt e nts Section 1 - 9 600 Compressor Description Ge n e ra l . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 -1 Be ne fi t s . . . . . . . . . . . . . . . . . . . . . . . . . . . . [...]

9600 Com pres sor In stal lati on, Operat ion, a nd Ma intena nce 5 P/N 8040 540 T a ble of Co nte nts ( con ti nue d) Section 3 - In stallat ion Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1 Supply and R eturn Water L ine Connections . . . . . . . . . . . . . . . . . [...]

9600 Com pres sor In stal lati on, Operat ion, a nd Ma intena nce P/N 804054 0 6 T a ble of Co nte nts ( con ti nue d) App e ndi x A - Cu st ome r Su ppo rt Inf or m ation Appe ndi x B - Flow Diagram Appendi x C - Troubles hoot ing P r ocedures App e ndi x D - Sch e mat ic Figur es Figure 1- 1: 9600 Com pressor . . . . . . . . . . . . . . . . . . .[...]

9600 Com pres sor In stal lati on, Operat ion, a nd Ma intena nce 7 P/N 8040 540 T a ble of Co nte nts ( con ti nue d) Figure 5- 1: Disconnecting Self Sealing Couplings . . . . . . . . . . . . . . . . . . . . . . 5-2 Figure 5- 2: Adsorber Location within the 9600 C ompressor (R e ar Pan e l Rem ov e d ) . . . . . . . . . . . . . . . . . . . . . . .[...]

9600 Com pres sor In stal lati on, Operat ion, a nd Ma intena nce P/N 804054 0 1-1 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S Section 1 - 9600 Compr essor Description General This manual provides the information r equired to install, operate, and maintain the CT I-CR YOGENICS 9600 C ompressor . NOTE: All per sonnel with ins tallation, [...]

9600 Compres sor Descri ption 1-2 P/N 8040 540 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S Syst em Documentation The ma nuals for a sy st em cover two bas ic c omponents: the cr yopump and the Compressor . A manual is shipped with e ach system component to provide information for ins tallation and ope ration of that compone nt. A loose-[...]

9600 Com pres sor In stal lati on, Operat ion, a nd Ma intena nce P/N 804054 0 1-3 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S Figure 1-1: 9600 C ompre ssor 9 6 0 0 C O M P R E S S O R C O M P R E S S O R 9 6 0 0[...]

9600 Compres sor Descri ption 1-4 P/N 8040 540 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S Speci ficat ions Di me ns io ns The dimensions of the Compres sor are shown in Fi gur e 1-2. Figure 1-2: 9600 Compr e ssor Dimensions CAUTION Do not place a we ight greater than 75 lbs. (34Kg) on top of the Compressor . 19.5 2 IN. (496 MM ) 21.50 [...]

9600 Com pres sor In stal lati on, Operat ion, a nd Ma intena nce P/N 804054 0 1-5 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S We i g h t The weight o f the Com pressor is listed in T able 1-1. Electri cal The electri cal speci f icat i ons of the Compress or are listed in T able 1- 2. T able 1-1: Compressor W eight W e ight 200lbs./91k[...]

9600 Compres sor Descri ption 1-6 P/N 8040 540 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S Cooling W at er The water used to cool the Compressor mus t meet the specifications sh own in T able 1-3 for proper syst em operation. Figur e 1-3: W at er Flow Rate versus Pressur e Dr op T able 1-3: Cooling W ater Specifications Parame ter V alu[...]

9600 Com pres sor In stal lati on, Operat ion, a nd Ma intena nce P/N 804054 0 1-7 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S General The info rmation in T able 1-4 provides general Compressor operating specificat ions. NOTE: The 9600 Compr essor is des igned for continuous operation and should r emain ON when the cr yopumps ar e in a [...]

9600 Compres sor Descri ption 1-8 P/N 8040 540 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S Component Description The components of the 9600 Compres sor that are acc essible f rom the rear panel are shown in Figure 1- 4 a nd described in the following par agraphs. Figure 1-4: 9600 Compre ssor Rear V iew Com ponent Locations CO NTROL CIRC[...]

9600 Com pres sor In stal lati on, Operat ion, a nd Ma intena nce P/N 804054 0 1-9 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S System Circ uit Br eaker The System C ircuit Breaker protects main input power to the Compressor pump and module. The cir cuit breaker positions are labeled ON (1), which is in the UP position, and OFF ( 0), whi[...]

9600 Compres sor Descri ption 1-10 P/N 8040 540 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S Retu rn Gas Coup ling The Return Gas C oupling returns t he helium, which has been cycled through the cryopump, back to the Compressor . Refer to CTI-CR YOGENICS Helium Re frigerat ion System within this section fo r m ore inf orma tion. Cooling [...]

9600 Com pres sor In stal lati on, Operat ion, a nd Ma intena nce P/N 804054 0 1-1 1 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S Cryopum p Pow e r Phase Switc h NOTE: The Cryopump Power Phase Switch is behind the system cir cuit br e a ker cover . The Cryopump Power Phase Switch matches the output power phase of the 9600 compressor to t[...]

9600 Compres sor Descri ption 1-12 P/N 8040 540 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S Figur e 1-5: 9600 Compre ssor Connected to Multip le On-Bo ard Cryopumps NOTE: Y our installation (number of pum ps per compr essor) will vary based upon the On-Board C ryopumps or W aterpumps used. Refer to Appendix A to cons ult your l ocal CTI[...]

9600 Com pres sor In stal lati on, Operat ion, a nd Ma intena nce P/N 804054 0 1-1 3 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S Multipl e Cryo-T orr Cryop um p Conn ection s The Cryo-T orr Interface pe rmits the c onnection of multiple Cryo-T orr Cryopumps to one Compressor as s hown in Figure 1-6. Re fe r to Section 3 - I nstallation [...]

9600 Compres sor Descri ption 1-14 P/N 8040 540 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S[...]

9600 Com pres sor In stal lati on, Operat ion, a nd Ma intena nce P/N 804054 0 2-1 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S Section 2 - Unpacking and Inspection In trod ucti o n The 9600 Compres sor is shipped in a s hipping carton incorporating a ramp system which mak es remo ving the Compressor from the carton s afe and easy . Ship[...]

Unpacki ng and Ins pe ction 2-2 P/N 8040 540 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S Figur e 2-1: U sing the Shipping Carton Ramp Co m press o r In sp ec ti o n Inspect the Compressor for visible signs of damage as indicated in the follo wing paragraphs. Compressor Inspect the exterior of the Compr essor for visible signs of damage,[...]

9600 Com pres sor In stal lati on, Operat ion, a nd Ma intena nce P/N 804054 0 3-1 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S Section 3 - Installation In trod ucti o n Section 3 pr ovi des you with the information required to ins tall the 9600 Compressor and connect it to si ngle or multiple On-Board or Cryo-T orr Cryopump conf igurati[...]

In st al la ti o n 3-2 P/N 8040 540 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S Figure 3-1: 9600 Compressor I nstallation Flowchart Sup ply a nd Re turn Wat er Line Con nections (refer t o page 3-3) Electri cal C onnec tions (refer t o page 3-4) Phase C heck (ref er to pag e 3 -6) Si ng l e Cry opum p Co nn e ct i ons (ref er to pag e 3[...]

9600 Com pres sor In stal lati on, Operat ion, a nd Ma intena nce P/N 804054 0 3-3 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S Suppl y and Re tu rn W ate r L in e C on nec ti ons NO TE: The water used f or cool i ng the Compr essor must meet the specif ications outlined in Section 1 - Compr essor Descrip tion . Hard W ate r L ines 1. Ap[...]

In st al la ti o n 3-4 P/N 8040 540 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S Electri cal Connecti ons The follo wing procedures provide inf ormation for making a ll three phase (180 - 250 V A C) electrical connec tions to the Compressor . P ower Cable Pr eparati on W ARNING Follo w all local high voltage s afety precautions whe n per[...]

9600 Com pres sor In stal lati on, Operat ion, a nd Ma intena nce P/N 804054 0 3-5 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S Figure 3-2: 9600 C ompre ssor Circuit Break er T erminals (Cover Removed) NO TE: The phase order in which the conduc tor terminal lugs are connected to cir cuit br eaker terminals X, Y , and Z will be determined[...]

In st al la ti o n 3-6 P/N 8040 540 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S Phase Check W ARNING Follo w all high voltage saf ety precautions when performing t his procedure to pre v ent the possibility of electrical shock. 1. Make sure power is applied to compressor cir cuit as de scribed in T able 1-2. NO TE: The cir cuit br eak e[...]

9600 Com pres sor In stal lati on, Operat ion, a nd Ma intena nce P/N 804054 0 3-7 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S Cryopump Po wer Ph ase Switch Sett ing NO TE: On-Boar d Cryopumps can operate on two or three-phase power . Cryo-T orr Cryopumps only operate on two-phase power . 1. Inspect the On-Board Cr yopump(s) being ins t[...]

In st al la ti o n 3-8 P/N 8040 540 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S Disconnect in g 1. Using two wrenches as sho wn in Figure 3-3, disconnect the two self sealing coupling connectors quickly to mi nimize helium leakage. Figur e 3-3: Connecting/Disconnecting Helium Flex Line Self Sealing Couplings This 1 3/16 in. wre nch is u[...]

9600 Com pres sor In stal lati on, Operat ion, a nd Ma intena nce P/N 804054 0 3-9 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S Sing le On- B oar d C r yopu mp Con ne c ti ons CA UTION Make sure the Compressor power is OFF before making an y connections to the rear panel. 1. Connect the Supply and Return lines to the 9600 C ompressor as [...]

In st al la ti o n 3-10 P/N 8040 540 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S Single Cry o-T orr Cry opump Con nections CA UTION Make sure the Compressor power is OFF before making an y connections to the rear panel. 1. Connect the Supply and Return lines to the 9600 C ompressor as described in Connect i ng/Discon n ect ing Helium Fl[...]

9600 Com pres sor In stal lati on, Operat ion, a nd Ma intena nce P/N 804054 0 3-1 1 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S Multipl e On-B oa rd Cryopum p Conn ection s CA UTION Make sure the Compressor power is OFF before making an y connections to the rear panel. Heliu m Line Connections CA UTION The use of se veral compressors o[...]

In st al la ti o n 3-12 P/N 8040 540 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S P ower Cable Connections 1. Connect the On-Board Splitter Box po we r cable between the CR Y OPUMP ELECTRICA L OUTLET on t he rear panel of the Compressor and the On-Board Splitter Box po we r connector as sho wn i n Figure 3- 6. 2. Connect the On-Board Cry[...]

9600 Com pres sor In stal lati on, Operat ion, a nd Ma intena nce P/N 804054 0 3-1 3 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S Figur e 3-7: Alter native Multipl e On-Board Cry op ump or W at e r pump Installation (Split ter Box located at Compr essor) Multiple Cry o - T orr Cry op ump Connections CA UTION Make sure the Compressor powe[...]

In st al la ti o n 3-14 P/N 8040 540 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S 1. Connect the Supply and Return lines to the 9600 C ompressor as described in Connect i ng/Discon n ect ing Helium Flex Lines within this section. 2. Connect the Gas Return Line to the customer s upplied helium manifold and then to the Gas Return connector[...]

9600 Com pres sor In stal lati on, Operat ion, a nd Ma intena nce P/N 804054 0 3-1 5 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S NO TE: The Cryo-T or r Interface c an be installed at the proces s tool containing the cryopumps as s hown in F igur e 3-8 or ne ar the Compr essor as show n in F igur e 3-9. CTI-CR YOGENICS r ecommends that t[...]

In st al la ti o n 3-16 P/N 8040 540 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S Figur e 3- 9: Alter nativ e Multiple Cry o-T orr Cryopump I n stallation CRY O PUMP PO WER CA BLES U SER R EMOTE (FROM V ACUUM SYSTEM) HELIUM SUPPL Y HELIUM RETURN WA T ER POW ER CR Y O -T ORR INT ERF A CE REMOTE[...]

9600 Com pres sor In stal lati on, Operat ion, a nd Ma intena nce P/N 804054 0 4-1 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S Sect ion 4 - Oper ation Ad ju st ing Syst em He liu m Pr essur e Y our C TI-CR Y OGE NICS high vacuum pump system is comprised of se veral pressurized components i.e. compressor , flex lines, and cryopumps. Each[...]

Operati on 4-2 P/N 8040 540 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S NO TE: The use of a higher helium c har ge pr es sur e for 50 HZ operation is necessar y in or der to compens ate for the sl ower s peed at whi ch the compr e s sor operates at 50 HZ. The s tatic char ge le vel for 60 H z r e mains at 240-250 PSIG. CA UTION Exceedin[...]

9600 Com pres sor In stal lati on, Operat ion, a nd Ma intena nce P/N 804054 0 4-3 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S If you hav e concerns about sys tem perf ormance changing, then check the normal system ope rating pr essure whic h was determ ined in Compressor Operat ion within this s ection. I f the norm al system operating[...]

Operati on 4-4 P/N 8040 540 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S[...]

9600 Com pres sor In stal lati on, Operat ion, a nd Ma intena nce P/N 804054 0 5-1 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S Secti on 5 - Maint en anc e Sc h edul ed Main tena n ce Suggeste d Ma intena nce Equipment It is r ecommended to ha ve the follo w ing equipment and disposable supplies a v ailable as listed in T able 5-1. T abl[...]

Mainte nan ce 5-2 P/N 8040 540 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S Adsorber Rep lacem en t Use the following procedur e to change the adsorb er ev er y three year s. 1. Set the S y s tem Circuit Breaker , on the rear of the 9600 Compres sor , to the OFF position. 2. Remo ve the 4 screws which secure the rear panel to the Compres[...]

9600 Com pres sor In stal lati on, Operat ion, a nd Ma intena nce P/N 804054 0 5-3 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S 9. Ensure that the press ure gauge reads the proper value as shown in T able 4-1. If additional gas pr essure is r equired, refer to A dding Heliu m within this section. If gas pressur e needs to be reduced, re [...]

Mainte nan ce 5-4 P/N 8040 540 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S Ad ju st ing Syst em He liu m Pr essur e NO TE: These pr ocedur es can be performed on a c ompr essor that is turned ON or OFF . However , the he lium pr essur e gaug e should be se t to the static helium c har ge pr e ssur e value if the compr essor is turned OF[...]

9600 Com pres sor In stal lati on, Operat ion, a nd Ma intena nce P/N 804054 0 5-5 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S • T o the v alue pre viously recorded in the Compr esso r Ope rati on procedure in Section 4 - Operation if the compressor is ON. 3. Close the gas charge co ntrol v alve and install the flare cap. Incr easing [...]

Mainte nan ce 5-6 P/N 8040 540 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S 2. Pur ge the re gulator and charging lines as follo ws: a. Open the re gulator a small amount b y turning the adjusting knob clockwise unt il it contacts the diaphragm, t hen turn approximately 1/8 to 1/4 turn more, so that the re gulator is barely open. b . Loo[...]

Document Ti tl e ELIX H ©2004 Heli x Technology Corpora tio n Pub. No. 8040509 , Rev. 101, 01/2 6/04 ECO No. 16210 A-1 Pr elimary Appe nd ix A - Cust omer Su pport Infor mation Customer Support Center Locations T o loca te a Customer S upport Center near you, please vis it our webs ite www .helixtechnology .com on the world wide web a nd select CO[...]

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9600 Com pres sor In stal lati on, Operat ion, a nd Ma intena nce P/N 804054 0 B-1 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S A ppendix B - Flo w Diagram Figur e B-1:9600 Compres sor Flow Diagram[...]

Appendi x B - Flow Diagram B-2 P/N 8 040540[...]

9600 Com pres sor In stal lati on, Operat ion, a nd Ma intena nce P/N 804054 0 C-1 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S A ppendix C - T rou bleshooting Pr ocedur es T roublesho oting t he Compressor The compressor troubleshooting procedur es ar e summarize d in T able C-1. T echnic a l I nqu irie s Ple a se r e fe r to A ppend ix[...]

Appendix C - Trou bles hooting P rocedur e s C-2 P/N 8040 540 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S T able C-1: Compressor T roubleshooting Procedures Problem Possible Cause Correctiv e Action 1) Sys tem ci rcuit br eaker (CB1) tri ps immedia tely to the O FF (0) position when switch ed to the ON (1) position. 1) Incorrect pha sin[...]

9600 Com pres sor In stal lati on, Operat ion, a nd Ma intena nce P/N 804054 0 C-3 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S 3) Sys tem ci rcuit br eaker (CB1) will not remain in the ON (1) position wh en switch ed ON. The Control Circ uit c ircuit breaker ( CB2) trips w hen excessive current is being drawn by the cold head or 24 volt[...]

Appendix C - Trou bles hooting P rocedur e s C-4 P/N 8040 540 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S[...]

9600 Com pres sor In stal lati on, Operat ion, a nd Ma intena nce P/N 804054 0 D-1 C HELIX TECHN OLOGY CORPO RA T ION - TI C RY OG EN IC S A p pen d ix D - Sc he ma tic[...]

Figur e D-1:9600 Mot or Driv e Compressor Schemati c[...]